Large Linear Motor lithography equipment iGrapher3000 is put into operation. After more than a decade of painstaking research, researchers led by Dr Pu Donglin of Su da Wei finally succeeded in developing a large-scale ultraviolet 3d direct-writing lithography device called IGRAPHER3000, which has been used in industrial fields. 

   To our knowledge, the IGRAPHER3000 has the functions of real-time processing, transmitting and synchronously writing massive data files for fast lithography, large-area lithography thick plate, three-dimensional micro-structure morphology exposure proximity effect compensation, etc. , it is a new platform for the design, development and manufacture of novel materials and advanced OPTOELECTRONIC devices. 

    It is well known that photolithographic machines are closely related to chips. In the new product industry, photolithographic machines are divided into two types, for example, ASML's EUV projection lithography machine; one is a direct writing lithography machine, which is used to prepare chip photomasks for 0.25 ΜM and above nodes, and part of the photomasks below 0.18 μm nodes, such as the Alta lithography machine of applied materials. 

    Focus, whether it is projection lithography machine or direct writing lithography machine, Kunshan Tongmao Electronic R & D, production and sales of linear motor in which there are practical applications. For example, Shanghai Microelectronics is the main projection lithography machine business, and it is our strategic partners with Mao, has many times from our purchase of high-performance Linear Motor; In addition, Tongmao linear motor has been used in the research and development of direct writing applications for laser micro-nano lithography. The direct writing machine can use high precision laser beam with 1 m diameter spot at focal length ≤2 m, at low speed (2mm/s) , 2m linewidth lithography was performed on the material. 

      Kunshan is a professional developer and manufacturer of linear and Rotary Motion Solutions for Voice Coil Motors and linear motors. Tongmao linear motor with excellent quality and perfect after-sales, has been recognized by many customers. 

      The article was originally written by www.tmmotion.com in Kunshan, China. Please quote the source.