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ASML releases new wafer testing equipment for linear motor modules. Mention the name of Asml, I believe everyone knows, everyone knows, because in the field of photolithography, it is two, no one dares to say one, ASML production of Evu photolithography machine is "hard to find money".
Recently, ASML introduced a new product in addition to the lithographic machine, namely the first generation of Hmi multi-beam Detector Hmi escan 1000, the wafer detector for the 2020 mass production of 5nm and more advanced technology, can let the manufacturer's production capacity jump about 600% .
The HMI escan 1000 has a very complicated optoelectronic system, which can produce and control the electron beam in batches, and then analyze the quality of the wafers according to the reflected electron beam imaging. In addition, it also runs a high-speed platform and computing system, can accurately control and process the number of test wafers, electron beam data.
When it comes to wafer testing equipment, linear motor module has been used in a series of practical cases. It is not known whether the first generation HMI MULTI-BEAM DETECTOR HMI ESCAN1000 has introduced the linear motor module.
Kunshan Tongmao Electronics Co. , Ltd. . Deep Tillage Linear Motor module field more than 10 years, Tongmao high-precision linear motor module is the main application areas of wafer testing, laser processing, gene sequencing.
The article was originally written by www.tmmotion.com in Kunshan, China. Please quote the source.
