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Current position:Home > News Korean chip maker to introduce Linear Motor lithography machine

Korean chip maker to introduce Linear Motor lithography machine

time:2021/2/26  click:5915

     Korean chip maker to introduce Linear Motor lithography machine. According to media reports, the recently completed M16 factory of South Korean chip maker SK Hynix was officially started in November 2018 with an investment of about 3.5 trillion won and took more than two years to complete. 

     It is reported that M16 plant length, width and height of about 336M, 163M, 105m, building area of 57,000 square meters, in the current production base of SK Hynix, the scale can be in the forefront. In addition, it is worth highlighting that the M16 will introduce EUV lithography equipment and start manufacturing 1 nm DRAM products in the second half of 2021. 

     EUV lithography equipment, since the chip technology into the 7nm process, EUV lithography machine has become an indispensable weapon, currently the world only the Dutch ASML company can produce, a price of 1 billion RMB. In recent years, in order to break the monopoly of Asml, all countries in the world are committed to conquering the lithography technology. 

     And did you know that linear motors have been used in lithographic machines? Linear motors are mainly used in the lithographic mask platform system. The motion of Linear Motors can be divided into scanning motion and positioning motion, the scanning motion mainly completes the exposure processing of the silicon wafer, which requires high positioning accuracy and speed stability, and pursues the optimization of time on the basis of stability. 

直线马达

     Kunshan with Mao Electronics Co. , Ltd. . self-developed and self-selling linear motor in lithography machine has a practical application, such as Shanghai microelectronics is our co-customers with Mao. 

     The article was originally written by www.tmmotion.com in Kunshan, China. Please quote the source.