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Current position£ºHome > News Linear motor applications in lithography systems

Linear motor applications in lithography systems

time£º2017-8-11  click£º3040

¡¡¡¡Photolithography refers to the technology of transferring the pattern on the reticle to the substrate by means of a photoresist (aka photoresist) under the action of light. The main process is as follows: first, ultraviolet light is irradiated to a surface of a substrate with a layer of photoresist film through a mask plate to cause a chemical reaction of the photoresist in the exposed area; and then the exposed area or the unexposed area is dissolved and dissolved by a developing technique Photoresist (the former refers to the positive photoresist, the latter known as the negative photoresist), the mask pattern is copied to the photoresist film; and then use the etching technology to transfer graphics to the substrate.

¡¡¡¡With the development of society, a variety of fake and shoddy products more and more anti-counterfeiting technology is particularly important. Precision lithography system is mainly used for counterfeiting products of counterfeit and shoddy products. It is the positioning accuracy of the lithography machine put forward higher requirements.
¡¡¡¡The traditional motor coupled with a set of conversion mechanism and the composition of the linear motion drive device has been unable to meet the requirements of modern control systems. On the other hand, linear motor driven precision lithography systems are widely used because of the advantages of linear drive-driven displacement mechanisms in terms of rapid response capability and accuracy, which are difficult to match by ordinary drive mechanisms.

¡¡¡¡Linear motor compared with the traditional motor several advantages: First, the structure is simple, because the linear motor does not need to turn the movement into a linear motion of the additional device, which makes the system itself greatly simplified structure, weight and volume greatly reduced; Second, the positioning accuracy is high, in the need for linear motion where the linear motor can achieve direct drive, which can eliminate the intermediate links brought about by a variety of positioning errors, so the positioning accuracy, such as the use of computer control, you can also greatly improve The accuracy of the entire system positioning; Third, the reaction speed, high sensitivity, good followers. The linear motor is easy to use for its mover to support the magnetic levitation, thus keeping a certain air gap between the mover and the stator without touching, which eliminates the contact frictional resistance between the stator and the rotor, thus greatly improving the system Of the sensitivity, speed and follow-up; four is safe and reliable, long life Linear motor can achieve non-contact transmission force, mechanical friction loss is almost zero, so less failure, maintenance-free, and thus work safe and reliable, long life.
¡¡¡¡Linear motor using the grating resolution of up to 0.1¦Ìm, not only improve the speed of lithography, but also to improve the accuracy of lithography. As the linear motor structure is simple, fast response, high sensitivity, good followers, good sealing, not afraid of pollution, adaptability, stable and reliable, long life and other advantages, it is more and more industrial applications in the production wide.
¡¡¡¡Kunshan Tongmao Electronics Co., Ltd. £¨www.tmmotion.com/english/index.asp£© is a set of linear motor technology research and development, linear motor, voice coil motor, precision linear platform and marketing as one of the manufacturers. We are free of charge for customers to choose the linear motor, in order to allow customers to more direct and easy to use linear motor, I also introduced a variety of models of linear motor module, follow-up we will continue to focus on R & D manufacturing more To adapt to the market, suitable for customer demand for linear motor module, welcomed the majority of friends with a lot of attention with Tongmao straight motor.