Customer service:400-007-7724
  • Voice Coil Motors
  • Ironless Core Linear Motors
  • Iron Core Linear Motors
  • Linear Motor Stages
  • Linear Motor Drivers
Product list
Contact us

Telephone: 400-007-7724

Fax: +86 512-82175788

Postcode: 215300

E-mail: info@tmmotion.com

Address: Building 2,No.1299 Fuchunjiang Road,Development Zone Kunshan City Jiangsu Province, China.

Current position:Home > News Discussion on new high-precision Wafer thinning machine with cyclopentadiene linear motor

Discussion on new high-precision Wafer thinning machine with cyclopentadiene linear motor

time:2021/12/28  click:3603

     A 12-inch (300-MM) high-precision Wafer thinning machine developed by Huahaiqing Science and Technology Company, led by Professor Lu Xinchun of Tsinghua University’s Department of Machinery, has been shipped, according to a Tsinghua University official, to a domestic integrated circuit leading enterprises! 

    As far as the Tongmao Linear Motor series is concerned, the 12-inch high-precision Wafer thinning machine is one of the key equipments in the manufacture of integrated circuits. It has been monopolized by foreign manufacturers for a long time due to its high complexity, high technical difficulties and high market access threshold, the domestic market can only rely on imports. 

     In order to overcome the “Neck jam”technology, Professor Lu Xinchun spent more than 10 years successively mastering the core technologies of ultra-precision grinding, intelligent control of flatness, surface damage and defect control, finally, a 12-inch (300 mm) high-precision Wafer thinning machine is successfully developed. The thinning machine will be applied to the 3D IC manufacturing and advanced packaging chip manufacturing lines to meet the needs of the 12-inch Wafer high-precision thinning process. 

      Although it is uncertain whether the high-precision Wafer thinning machine is related to linear motors, linear motors have practical applications in wafer testing equipment as well as wafer processing equipment such as lithography and packaging machines. 

同茂线性马达

       Kunshan Tongmao Electronics Co. , Ltd. . Research and production of Tongmao linear motor are used in Europe and the United States technical standards and processing technology, Tongmao linear motor is widely used in the semiconductor industry. 

     The article was originally written by www.tmmotion.com in Kunshan, China. Please quote the source.